Although the local probe oxidation technique is not limited to the use of AFM tips – electrodes and large electrodes as TEM grids or even water droplets may be applied – their application has disadvantages as they restrict the achievable resolution and freedom of pattern choice. In addition, since the oxidation of the monolayer only occurs in a narrow process window (pulse height and pulse duration), control over the oxidation process using macroscopic electrodes is critical.

In our work we report the use of automated AFM equipment as well as the operation of parallel cantilever arrays for large-scale local probe oxidation of octadecyl trichlorosilane (OTS) monolayers. Using both methods we demonstrate the large-scale surface electro-oxidative patterning of OTS monolayers as a step towards the large-scale preparation of an all probe-produced device.