The technique uses a Bessel beam optical trap to position a sub-micron polystyrene sphere in water on a polyimide substrate in the x-y plane. In the z direction, the Bessel beam scattering force and the surface repulsion force compensate each other to self-position the bead relative to the target surface.

Parallel nanopatterns over a 1.5 µm model polyimide step were generated using a pair of trapped microspheres, which focus a processing laser beam in the near-field, and locally modify the surface right below the spheres. A feature size variation of less than 4% and a laterally positional accuracy of 25 nm across a step can be achieved using the set-up. The team employed a Brownian motion model to describe and predict the positional accuracy of the system.

Multiple applications

The technique presented here explores the use of a pure optical method to fabricate user-defined nanofeatures on the fly in the absence of complex cleanroom procedures. Potential applications include the generation of nanopatterns for tissue engineering or plasmonic devices, and photonic structures for metamaterials.

Full details can be found in the journal Nanotechnology.