Coating cantilevers
A wafer of nanomechanical cantilever array chips being functionalized using an array of four parallel inkjet pipettes. Operated at a distance of 0.4 mm the piezo-driven nozzles can direct 300 pl droplets onto selected microcantilevers with an accuracy of 10 microns (upper inset). For gas sensor applications a cantilever array was printed with eight different polymers (lower inset).