Surface detail
SEM image of a sample showing a mixture of micro- and nanoscale features. (inset top) water droplet on a sample annealed at 650 degC for 10 min, taken at 192 hours after the AIC of a-Si process. (inset bottom) water droplet on a sample annealed at 650 degC for 10 min, after coating with a thin layer of C4F8.