Feb 22, 2011
SIMS Imaging of Semiconductor Contact Pads
SIMS imaging provides a rapid method of assessing surface chemistry and identifying pads covered by even a few monolayers of contamination. Understanding of the distribution of contamination leads to better process optimization and higher product yield. Operated with sufficiently low beam current density and a high sensitivity analyzer, like the Hiden MAXIM, it is possible to collect images with top monolayer specificity. This is vital when addressing bonding and adhesion issues as it is that uppermost monolayer which will interact with other components.