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Company details

Surface Technology Systems plc Jan 21, 2008

About this company

Surface Technology Systems plc
Imperial Park
NP10 8UJ
United Kingdom

Tel: +44 (0)1633 652 400
Fax: +44 (0)1633 652 405

Manufacturer of plasma (ICP & RIE) etch and (PECVD) deposition systems for R&D or volume production applications. Technologies include the market-leading ASE® (or DRIE) and other enabling processes used in MEMS, nanofabrication and packaging.


Products from this company

  1. STS receives order for Pegasus DRIE tool from Georgia Tech Mar 10, 2008

    Georgia Inst of Technology orders Pegasus system as part of their new Nanotechnology Research Center