Surface Technology Systems plc Jan 21, 2008
About this company
Surface Technology Systems plc
+44 (0)1633 652 400
Fax: +44 (0)1633 652 405
Manufacturer of plasma (ICP & RIE) etch and (PECVD) deposition systems for R&D or volume production applications. Technologies include the market-leading ASE® (or DRIE) and other enabling processes used in MEMS, nanofabrication and packaging.
Products from this company
Georgia Inst of Technology orders Pegasus system as part of their new Nanotechnology Research Center