SemiTEq JSC Dec 3, 2013
About this company
Engels avenue, 27, bld. 5, lit.A
+2 812 633 05 96
SemiTEq is the Russian brand which covers wide range of HV and UHV equipment.
Products from this company
New compact MBE System for III-V, II-VI and III-N compounds growth
STE3N3 MBE System for III-Nitrides growth Dec 3, 2013
Advanced MBE Systems for high-temperature epitaxial growth of III-Nitrides
STE35 is a modern technological platform for precise growth of epitaxial layers on wafers with diameter of 2”, 3”, 100 mm, as well as three 2” wafers on the same platen.
Two-reactor STE3526 MBE System is specially designed for growth of hybrid heterostructures А3В5/А2В6 taking into account all specific of MBE growth of these material systems.
STE ICP series is intended in two basic modifications: STE ICPe (Plasma Chemical Etching) and STE ICPd (PECVD). Maximum diameter of wafers is up to 200 mm with possibility of using free shape samples.
The system design enables to integrate it into multipurpose UHV cluster process line. Maximum quantity of wafers: 3х3” or 6х2”.
STE MS105 Versatile Magnetron Sputtering System Dec 3, 2013
Versatile System for the deposition processes in vacuum using magnetron sputtering technique. STE MS105 System is designed in accordance with all modern principles of magnetron PVD processing.
STE RTA100 System for thermal processing Dec 3, 2013
System for rapid thermal annealing process of semiconductor wafers in inert atmosphere
STE RTP150 System for rapid thermal processing Dec 3, 2013
System for high-temperature treatment of semiconductor wafers in controlled gas, vacuum, oxidizingor deoxidizing atmosphere