This site uses cookies. By continuing to use this site you agree to our use of cookies. To find out more, see our Privacy and Cookies policy.
Skip to the content

IOP A community website from IOP Publishing

Key supplier

Product details

6-Axis Nanopositioning System for Vacuum Applications Mar 6, 2008

The M-824 Vacuum Hexapod 6-Axis micropositioning and alignment system from nanopositioning specialist PI provides high resolution motion in 6 degrees of freedom.

It is designed to work in a vacuum and combines multiaxis motion to 45 mm (linear) / 25 degrees (rotation) with sub-micron resolution and repeatability–ideal for alignment an precision positioning tasks.

The greatest Hexapod advantage is its compact size compared to conventional six-axis positioning systems, a fact that is especially beneficial in applications in vacuum chambers, where space is at a premium.

Typical Applications: Semiconductor technology, multi-axis alignment of optics, X-ray microscopy, X-ray monochromators

General Features & Advantages of Hexapods:
Compared to conventional stacked "serial" kinematics 6D micropositioning systems the Hexpod (parallel kinematics) approach has the following advantages:

  • Smaller Envelope for Easy Integration
  • Higher Stiffness and Minimized Inertia for Faster Response and Alignment
  • No Moving Cables (No Friction) for Increased Reliability and Repeatability
  • Center of Rotation can be Changed with One Software Command
  • No Accumulation of Runout Errors—Better Multi-Axis Repeatability

Features of the M-824 Hexapod:

  • Design Resolution: 0.007 µm
  • Vacuum Compatible to 10-6 hPa
  • Compact Size: 280 mm Diameter x 190 mm Height
  • 6 Degrees of Freedom
  • Linear Travel Ranges : to 45 mm
  • Rotary Travel Ranges: to 25 deg.
  • Powerful Controller and Software for Alignment
  • 10 kg Load Capacity

About PI
PI is a leading manufacturer of nanopositioning and precision motion-control equipment for photonics, nanotechnology, semiconductor and life science applications. PI has been developing and manufacturing standard & custom precision products with piezoelectric and electromagnetic drives for 35+ years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries and total staff of 450+.

More Information

East Coast Contact
Jim Gareau
Tel: (508) 832-3456
Fax: (508) 832-0506

West Coast Contact:
David Steinberg
Tel: (949) 679-9191
Fax: (949) 679-9292
PI (Physik Instrumente) L.P.

Physik Instrumente (PI)
GmbH & Co. KG
Auf der Römerstr. 1
D-76228 Karlsruhe/Palmbach
Tel: +49 (721) 4846-0
Fax: +49 (721) 4846-100

Hexapod Catalog