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6-Axis Nanopositioning System for Vacuum Applications Mar 6, 2008

The M-824 Vacuum Hexapod 6-Axis micropositioning and alignment system from nanopositioning specialist PI provides high resolution motion in 6 degrees of freedom.

It is designed to work in a vacuum and combines multiaxis motion to 45 mm (linear) / 25 degrees (rotation) with sub-micron resolution and repeatability–ideal for alignment an precision positioning tasks.

The greatest Hexapod advantage is its compact size compared to conventional six-axis positioning systems, a fact that is especially beneficial in applications in vacuum chambers, where space is at a premium.

Typical Applications: Semiconductor technology, multi-axis alignment of optics, X-ray microscopy, X-ray monochromators

General Features & Advantages of Hexapods:
Compared to conventional stacked "serial" kinematics 6D micropositioning systems the Hexpod (parallel kinematics) approach has the following advantages:

  • Smaller Envelope for Easy Integration
  • Higher Stiffness and Minimized Inertia for Faster Response and Alignment
  • No Moving Cables (No Friction) for Increased Reliability and Repeatability
  • Center of Rotation can be Changed with One Software Command
  • No Accumulation of Runout Errors—Better Multi-Axis Repeatability

Features of the M-824 Hexapod:

  • Design Resolution: 0.007 µm
  • Vacuum Compatible to 10-6 hPa
  • Compact Size: 280 mm Diameter x 190 mm Height
  • 6 Degrees of Freedom
  • Linear Travel Ranges : to 45 mm
  • Rotary Travel Ranges: to 25 deg.
  • Powerful Controller and Software for Alignment
  • 10 kg Load Capacity

About PI
PI is a leading manufacturer of nanopositioning and precision motion-control equipment for photonics, nanotechnology, semiconductor and life science applications. PI has been developing and manufacturing standard & custom precision products with piezoelectric and electromagnetic drives for 35+ years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries and total staff of 450+.

More Information

USA:
East Coast Contact
Jim Gareau
Tel: (508) 832-3456
Fax: (508) 832-0506
Email: info@pi-usa.us

West Coast Contact:
David Steinberg
Tel: (949) 679-9191
Fax: (949) 679-9292
Email: info@pi-usa.us
PI (Physik Instrumente) L.P.

EUROPE:
Physik Instrumente (PI)
GmbH & Co. KG
Auf der Römerstr. 1
D-76228 Karlsruhe/Palmbach
Tel: +49 (721) 4846-0
Fax: +49 (721) 4846-100
Email: info@pi.ws
http://www.physikinstrumente.com

Hexapod Catalog

 

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