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6-Axis and 3-Axis Parallel Kinematic Stages (Hexapod & Tripod) Provide Nanometer Precise Motion Mar 6, 2008

PI (Physik Instrumente) L.P. offers a new brochure on Hexapod 6-Axis Parallel Kinematics Robots and Positioning Systems as well as Tripod stages.

The Hexapod system, (also known as Stewart Platform), which is supplied with a special motion controller, has unique features when compared to a stacked series of stages.

Advantages of Parallel Kinematics (PKM) Systems over
standard (stacked) Serial Kinematics Stages:

  • Programmable Pivot Point for Simple Rotational Alignment Tasks
  • Lower Inertia and Higher Stiffness
  • Better Dynamic Behavior
  • Smaller Package Size
  • No Accumulation of Position Errors, Reduced Runout Errors
  • No Moving Cables for Better Repeatability and Reliability

The brochure presents a variety of standard and custom hexapod systems, featuring sub-micrometer resolution, and load capacities from 2 kg to 1000 kg.
PI has been designing and manufacturing hexapod positioning robots since the early 1990's. Today, standard hexapod designs come in all shapes and sizes and include servo motor-driven systems for moving large optics up to 1 m diameter to piezo based designs for nanometer precise control of semiconductor wafers and masks. Standard and custom systems are available in non-magnetic and vacuum compatible versions.

These parallel motion systems are designed for applications in fields such as:

  • Optics & Photonics, Telecommunication
  • Astronomy / Aerospace
  • Biotechnology
  • Semiconductor Test & Handling
  • Microscopy

More Information:
The hexapod brochure can be downloaded at:

About PI (Physik Instrumente)
PI is the industry leader in ultra-precision motion control devices for nanoscale manufacturing, test and research applications. PI has been developing and manufacturing standard & custom precision products with piezoelectric and electromagnetic drives for 35+ years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries and total staff of 450+. PI – Moving the NanoWorld.

More Information

East Coast Contact
Jim Gareau
Tel: (508) 832-3456
Fax: (508) 832-0506

West Coast Contact:
David Steinberg
Tel: (949) 679-9191
Fax: (949) 679-9292
PI (Physik Instrumente) L.P.

Physik Instrumente (PI)
GmbH & Co. KG
Auf der Römerstr. 1
D-76228 Karlsruhe/Palmbach
Tel: +49 (721) 4846-0
Fax: +49 (721) 4846-100

Hexapod Catalog