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PI News: Capacitive Displacement Sensor Brochure & Tutorial Available Mar 6, 2008

A new brochure featuring a tutorial on single- and dual-plate capacitive sensors and applications is available from PI (Physik Instrumente).

PI is a global leader in ultraprecision motion control and sensing equipment for biotechnology, nanotechnology, photonics, semiconductor and life science applications.

Capacitive position gauges perform high-precision, noncontact measurements of geometric quantities representing displacement, vibration, separation, position, length or other linear dimension against any kind of electrically conductive target.

The Capacitive Sensors brochure features overviews on these topics:

  • measuring displacement with nanometer precision;
  • nanopositioning, closed-loop systems;
  • parallel metrology, high-precision multi-axis measurements;
  • measuring straightness and flatness, active cross-talk compensation;
  • out-of-plane measurement, constant-height scans, out-of-round measurement;
  • tip-tilt measurement and compensation;
  • measuring vibration, flatness, thickness; force sensors with micronewton sensitivity;
  • layer thickness measurement with submicron accuracy.

It may be ordered from PI (free) or can be downloaded at:

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Jim Gareau
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