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Precision Beam Steering Systems for Lithography, Optical Communications, Imaging use Parallel Kinematics Piezo Drives Mar 6, 2008


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Beam steering speed and accuracy are important for many high tech applications from lithography to optical communications. Piezo electric beam steering mechanisms achieve ultra-high angular precision and speed.

Widely used in nanopositioning devices, low-inertia, parallel kinematics, flexure-guided designs provide superior positioning accuracy with minimal parasitic errors, and excellent dynamic properties. Integrated high-resolution feedback sensors and closed-loop control with advanced motion controllers are essential for high system performance.

PI (Physik Instrumente) L.P. — a leading manufacturer of nanopositioning and piezo-based precision motion-control equipment for bio-nanotechnology, photonics and semiconductor applications — now offers several new high-dynamics piezo steering mirror platforms.

More Information on the S-330 Fast Steering Mirrors:

Features & Advantages:


  • Optical Beam Deflection to 20 mrad (>1°)
  • > 3kHz Resonant Frequency for Sub-Millisecond Step Response
  • Resolution to 20 nrad — Excellent Position Stability
  • Parallel-Kinematics Design for Higher Dynamics, Stability & Linearity
  • Closed-Loop Versions for Better Linearity
  • Differential Drives for Excellent Temperature Stability



Typical Applications
Beam correction, laser surgery, image stabilization, interlacing, dithering, laser scanning / beam steering, optical communications, high resolution microscopy / spectroscopy

2-Axis, Flexure Guided, No Polarization Rotation
S-330 steering mirror platforms provide precise angular tip/tilt motion of the top platform around two orthogonal axes. These flexure-guided, piezoelectrically driven systems can provide higher accelerations than other actuators, enabling step response times in the sub-millisecond range.

The single pivot-point design also prevents the drawback of polarization rotation, which is common with conventional 2-axis stacked systems, e.g. galvo scanners.

Closed-loop and open-loop versions with 3 different tilt ranges up to 10 mrad (20 mrad optical deflection) are available.

Parallel-Kinematics: Smaller with Improved Stability, Linearity & Dynamics
PI piezo steering mirrors are based on a parallel-kinematics design with coplanar rotational axes and a single moving platform driven by two pairs of differential actuators. The advantage is jitter-free, multi-axis motion with excellent temperature stability. Compared to stacked (two-stage), mirror scanners, the parallel-kinematics design provides symmetrical dynamic performance in both axes with faster response and better linearity in a smaller package.

More on Fast Steering Mirror (FSM) Platforms

About PI
PI is a leading manufacturer of nanopositioning and precision motion-control equipment for photonics, nanotechnology, semiconductor and life science applications. PI has been developing and manufacturing standard & custom precision products with piezoelectric and electromagnetic drives for 35+ years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries and total staff of 450+.

 

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