STS receives order for Pegasus DRIE tool from Georgia Tech Mar 10, 2008
Surface Technology Systems plc
+44 (0)1633 652 400
Fax: +44 (0)1633 652 405
Georgia Inst of Technology orders Pegasus system as part of their new Nanotechnology Research Center
Newport, Wales, United Kingdom – 20 Feb 2008: Surface Technology Systems plc (STS), a leader in plasma process technologies required in the manufacturing and packaging of micro electromechanical systems (MEMS) and advanced electronic devices, today announced that they have sold a Pegasus Deep Reactive Ion Etch (DRIE) tool to the Georgia Institute of Technology, the first US university to order the latest generation of STS' Advanced Silicon Etch (ASE®) systems.