Molecular Beam Epitaxy system STE3N3 Apr 28, 2009
ATC - Semiconductor technologies & Equipment, JSC
27 Engels avenue
+7 (812) 702-13-08
Fax: +7 (812) 320-43-94
MBE system for group III nitrides growth
The STE3N3 is specially designed as a research and development MBE system for group 3 nitrides. TheSTE3N3 designed for up to 4" substrates growing in the ammonia flux. While III-V MBE system, it meets the unique nitrides requirements for cryopanels and substrate heating.