Molecular Beam Epitaxy system STE3532 Apr 28, 2009
ATC - Semiconductor technologies & Equipment, JSC
27 Engels avenue
+7 (812) 702-13-08
Fax: +7 (812) 320-43-94
The STE3532 is a Molecular Beam Epitaxy system designed to meet all the requirements in a range from fundamental research up to device engineering R&D.
Being a "lab-to-fab" system the STE3532 meets the requirements of scaling from R&D up to low volume production.
STE3532 designed as a stand-alone epitaxial system. On the other hand its design gives the possibility to connect it vacuum tightly to other technological and analysis chambers on liner basis. In accordance to customer request the STE3532 could be integrated in a cluster tool configured around circular motion telescopic substrate transfer system.
STE3532 MBE system is configured for III-V compounds heterostructure molecular beam epitaxial growth, and focused on InAlGaAs/GaAs material system.