Electron Beam evaporation System STE EB71 Apr 28, 2009
ATC - Semiconductor technologies & Equipment, JSC
27 Engels avenue
+7 (812) 702-13-08
Fax: +7 (812) 320-43-94
STE EB71 system is fully automated station for electron beam deposition of the high-quality thin-film compositions in ultrahigh vacuum.
This system was developed in the “lab-to-fab” ideology and designed for intensive research and development (R&D), as well as to be used for small-scale production as a part of the pilot production line.
The System design enables to integrate it into multipurpose UHV cluster processing system.