Product details
Electron Beam evaporation System STE EB71 Apr 28, 2009
Company details
ATC - Semiconductor technologies & Equipment, JSC
27 Engels avenue
Saint-Petersburg
Saint-Petersburg
194156
Russian Federation
Tel:
+7 (812) 702-13-08
Fax:
+7 (812) 320-43-94
STE EB71 system is fully automated station for electron beam deposition of the high-quality thin-film compositions in ultrahigh vacuum.
This system was developed in the “lab-to-fab” ideology and designed for intensive research and development (R&D), as well as to be used for small-scale production as a part of the pilot production line.
The System design enables to integrate it into multipurpose UHV cluster processing system.
Categories
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