Ion Flood Gun for Surface Preparation Mar 10, 2010

The ion flood source IS 40C1 is a compact, easy-to-use UHV extractor type ion source for sample surface cleaning. It is mounted on a DN 40CF flange and powered by a slim, 19” rack mounted digital power supply under full software control.

The source generates an ion current of 15-25μA/cm2 (Argon) with Gaussian beam profile. The beam diameter and current density depend on the source-to-sample distance. The mounting length of the source is adaptable to individual requirements (standard is 63mm).

There is a Direct Gas Inlet in the ionisation volume via an integrated DN 16CF port. The Y-oxide coated iridium filament is arranged in a non-line-of sight configuration is suitable for operation with all noble gases and with reactive gases such as O2, H2 and CH4

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