IS40E1 Focussed Ion Gun for SIMS/XPS Mar 9, 2010

The two lens system allows easy and continuous variation of spot size over the primary energy range of 0.15 keV to 5 keV and with beam current density of up to 25 μA/cm2.

The slim profile and specially designed nose-cone angle of 50° ensure best fit even in crowded chamber environments. The filament is non-line-of-sight to the sample, thereby minimising contamination from the source. It is field replaceable with non-critical alignment and long lifetime, making replacement both quick and economical compared with other designs.

The scanning area is 10x10 mm at the standard working distance of 23 mm and the sputter crater is extremely homogeneous over the scan area. This results in precise depth profiles with maximum depth resolution.

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