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Product details

Pyro 400 Aug 18, 2010

Company details

LayTec GmbH
Seesener Str. 10-13
LayTec GmbH

Tel: 0049 30 39 800 800

In-situ system for GaN surface temperature measurements that provides immediate access to emission wavelength variations - a huge benefit for yield enhancement in GaN-based LED production.

Yield enhancement in GaN-based LED production by precise control of GaN surface temperature:
LayTec’s in-situ monitoring system Pyro 400 is the first real solution for direct surface temperature measurements of GaN layers. The pyrometer takes advantage of the absorption of the GaN layer at 400 nm at growth temperature and enables direct measurements of GaN surface temperature during growth in production-line MOCVD systems.
The tool reveals temperature changes caused by different carrier gases as well as rotation speed and reactor pressure variations and wafer bowing effects. Together with the complementary reflectance and curvature data measured by EpiCurve®TT, the in-situ measurements give all information needed to optimize uniformity, improve LED performance and increase yield.