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EasyTube™ 101 Advanced CVD process development tool Sep 2, 2010

New CVD research and development tool platform part of the growing EasyTube™ products. Designed to address the budget limitations & growing safety concerns for the university or industrial researcher.

The EasyTube™ 101 platform is customer configured and can be upgraded or re-configured in the field for future process needs, thus enhancing its price/performance value. In the coming months, more process support information will be made available on our EasyTube™ product websites, thus providing increased support for our steadily growing worldwide EasyTube™ customer base.

Each EasyTube™ 101 system can be configured for a wide range of processes including ALD, APCVD, LPCVD, RTP, Annealing, Diffusion, etc. Most options and system reconfigurations can be added or installed in the field. The EasyTube™ 101 is controlled by our proprietary real-time LabWindow™ based process control software CVDWinPrC™

 

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