EasyTube™ 101 Advanced CVD process development tool Sep 2, 2010
First Nano div of CVD Equipment Corporation
1860 Smithtown Avenue
New CVD research and development tool platform part of the growing EasyTube™ products. Designed to address the budget limitations & growing safety concerns for the university or industrial researcher.
The EasyTube™ 101 platform is customer configured and can be upgraded or re-configured in the field for future process needs, thus enhancing its price/performance value. In the coming months, more process support information will be made available on our EasyTube™ product websites, thus providing increased support for our steadily growing worldwide EasyTube™ customer base.
Each EasyTube™ 101 system can be configured for a wide range of processes including ALD, APCVD, LPCVD, RTP, Annealing, Diffusion, etc. Most options and system reconfigurations can be added or installed in the field. The EasyTube™ 101 is controlled by our proprietary real-time LabWindow™ based process control software CVDWinPrC™