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Product details

Hiden Ion Milling Probe – End Point Detector Sep 28, 2010

Company details

Hiden Analytical Limited
420 Europa Boulevard
Warrington
Cheshire
WA5 7UN
United Kingdom

Tel: +44 (0)1925 445225
Fax: +44 (0)1925 416518

The only dedicated end point determination tool for ion etch control & optimum process quality.

The IMP is a differentially pumped, ruggedized secondary ion mass spec for the analysis of secondary ions & neutrals from the ion mill process, featuring:
-High Sensitivity SIMS/MS with Pulse Ion Counting Detector
-Triple filter Quadrupole, 300amu mass range is standard
-Differentially Pumped Manifold + Mounting Flange to Process Chamber
-Ion Optics with Energy Analyser & integral ioniser
-Penning Gauge & interlocks to provide over pressure protection
-Data System with integration to the process tool
-Stability (< ±0.5% height variation over 24h)
-MASsoft control via RS232, RS485 or Ethernet LAN
-Programmable DDE, Parallel Digital I/O, RS232 Scripting Communication

Applications: End point Analysis, Target Impurity Determination, Quality Control/SPC, Residual Gas Analysis, Leak Detection

 

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