ESPion, an Advanced Langmuir Probe for Plasma Diagnostics Sep 28, 2010

The most advanced and reliable Langmuir Probe available for:

- Etching / Deposition / Cleaning Plasma Processes.
- Pulsed plasma operation.
- Ion collection (Ni & Gi).
- Electron retardation (Te & EEDF).
- Electron collection (Ne).
- Plasma Potential.
- Debye Length, floating potential.
- Ion flux.

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