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ESPion, an Advanced Langmuir Probe for Plasma Diagnostics Feb 5, 2018

The most advanced and reliable Langmuir Probe

The most advanced and reliable Langmuir Probe available for:

- Etching / Deposition / Cleaning Plasma Processes.
- Pulsed plasma operation.
- Ion collection (Ni & Gi).
- Electron retardation (Te & EEDF).
- Electron collection (Ne).
- Plasma Potential.
- Debye Length, floating potential.
- Ion flux.

 

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