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Product details

EVG®770 Automated NIL Stepper Oct 18, 2010

Company details

EV Group
DI Erich Thallner Str. 1

Tel: +43 7712 5311 0
Fax: +43 7712 5311 4600

For step and repeat large area UV-Nanoimprinting processes (UV-NIL).

Designed for step and repeat large area UV-Nanoimprint Lithography (UV-NIL) processes, the EVG®770 covers applications like life science, optical components, mastering, 3D-Lithography and R&D for semiconductor devices. The system addresses growing customer demands for improved pattern fidelity at ever-smaller feature densities, greater process reliability and increased accuracy.