EVG®770 Automated NIL Stepper Oct 18, 2010
DI Erich Thallner Str. 1
+43 7712 5311 0
Fax: +43 7712 5311 4600
For step and repeat large area UV-Nanoimprinting processes (UV-NIL).
Designed for step and repeat large area UV-Nanoimprint Lithography (UV-NIL) processes, the EVG®770 covers applications like life science, optical components, mastering, 3D-Lithography and R&D for semiconductor devices. The system addresses growing customer demands for improved pattern fidelity at ever-smaller feature densities, greater process reliability and increased accuracy.