This site uses cookies. By continuing to use this site you agree to our use of cookies. To find out more, see our Privacy and Cookies policy.
Skip to the content

IOP A community website from IOP Publishing

Product details

Phantom III - Reactive Ion Etch (RIE) System Mar 16, 2011

Company details

Trion Technology
2131 Sunnydale Blvd.
Clearwater
FL
33765
United States

Tel: 727-461-1888

Designed to supply research and failure analysis laboratories with state-of-the-art plasma etch capability using single wafers, dies or parts using fluorine and oxygen based chemistries.

The system has a compact, modular design built on a space-saving platform.

"Frankly, the Phantom has been a GREAT machine since I have been a user. For this machine that has been at least 10 years. This Phantom was purchased originally by Philips where I used to work. The Phantom has followed me to Sipex and now Exar. I can't imagine living without it. It has been one of the best made and reliable plasma etchers I have used in my over 20-year career." - Don Breedlove, Failure Analysis Engineer, Exar Corporation.

 

More products from this company