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Product details

Park Systems: XE-WAFER Nov 16, 2011

Company details

Park Systems
KANC 4F, Iui-Dong 906-10
Korea, Republic of

Tel: +82-31-546-6800
Fax: +82-31-546-6805

Automated Industrial AFM for In-line Wafer Inspection and Metrology

Process engineers in hard disk drive and semiconductor industries need to increase in-line inspection accuracy of nanoscale metrology while cutting measurement time.

Park Systems Solution
The XE-Wafer is a fully automated industrial AFM that can measure surface roughness, trench width, depth and angle measurements on 200mm & 300mm wafers with precision in a production environment.

It increases yield while delivering the highest resolution and the lowest gauge sigma value for repeatability and reproducibility.


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