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Product details

Impedans SEMION™ for pulsed plasma diagnostics Mar 6, 2012

Company details

Henniker Scientific Ltd.
Unit B3, Trident Business Park
Daten Avenue
Warrington
WA3 6AX
United Kingdom

Tel: +44 (0) 1925 830 771
Fax: +44 (0) 1925 800 035

The Impedans Semion™ retarding field ion energy and flux analysers now feature an integrated time resolved operation mode for high time resolution studies of technological plasmas.

Pulsed plasmas are routinely used in a wide range of
nano-materials processing and production, from plasma
polymerised surfaces to super-hard tribiological coatings,
and there is a fundamental requirement to understand the
energy and flux of the ions that contribute to the thin film
coating properties.

The Semion™ is a compact ion energy and flux analyser
that directly measures these parameters at the substrate
position, with an energy range up to 2500eV and at process
pressures to 300mTorr, without the need for differential
pumping.

The new time resolved mode feature extends the range of
plasmas that can be studied to include pulsed systems
such as HIPIMS, with ion energy distributions and flux
now accessible for pulse frequencies up to 500kHz at a
time resolution of just 44nS

 

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