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Product details

The Impedans Semion™ System Mar 15, 2012

Company details

Impedans Ltd
Unit 8 Woodford Court
Woodford Business Park, Santry
Dublin 17
Ireland

Tel: 00353 1 842 8826
Fax: 00353 1 891 6519

The Semion™ System is a high-performance retarding field energy analyzer (RFEA) system.

The Impedans Semion ™

Process Ion Energy and Ion Flux Analysis System.

The Semion™ Retarding Field Energy Analyzer System is designed to measure both the Ion Flux and Ion Energy on a biased surface in a plasma chamber.

The RFEA Probe can be mounted on an electrode/substrate holder, or in a dummy wafer to sample wafer processing conditions.

The Semion™ System is suitable for installation on a wide range of plasma source configurations; capacitively coupled, inductively coupled, magnetron, cascaded arc, and remote source.

Semion™ can be used under the following bias conditions (single-, dual-, and multi-frequency)

Grounded
DC
Floating
RF
Pulsed/shape

 

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