Product details
The Impedans ALP System™ Langmuir Probe Mar 15, 2012
Company details
Impedans Ltd
Unit 8 Woodford Court
Woodford Business Park, Santry
Dublin 17
Ireland
Tel:
00353 1 842 8826
Fax:
00353 1 891 6519
The ALP System™ is a high resolution and high performance Langmuir Probe system which can be used to characterize many plasma types including DC, pulsed DC, microwave and RF plasmas.
The Impedans Advanced Langmuir Probe (ALP) System provides a powerful diagnostic for measuring key plasma parameters in low and medium pressure discharges.
High Resolution Plasma Characterisation is possible with the state-of-the-art Langmuir Probe and ALP Control Unit electronics. Using an intelligent pre-scan feature, the optimal plasma parameter measurements can be performed easily and repeatedly.
Features
The Impedans ALP System can provide the following primary plasma parameters in real-time:
Measure
Plasma Potential
Plasma Density
Electron Temperature
Ion current Density
EEDF
Categories
- Optical microscopy
- Scanning probe microscopy
- Electron microscopy
- Spectroscopy
- Nanopositioning systems
- Anti-vibration platforms
- Clean room technology
- Metrology
- Software: modelling
- Software: control
- Software: image analysis
- Self-assembly and alignment
- Lithography and etching
- Deposition and coating
- Patterning
- Plasma treatment
- Gas and flow sensing
- Temperature and strain measurement
- Nanoelectromechanical systems
- Fluidic cells
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