Hybrid Technique for High-Precision Positioning Tasks Apr 16, 2012
Im Gaisgraben 7
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Hybrid Technique for High-Precision Positioning Tasks
The OWIS® series of high-precision positioning stages with a bidirectional repeatability of 5 µm up to 2 µm - already proven and popular for years in research and industry - are now complemented by new series. The bidirectional repeatability of this new technique is less than 250 nm.
The hybrid technology allows the rapid and nanometer exact positioning of high loads - even with long travels.
To ensure the high-precision positioning, a high-resolution measuring system is integrated in the positioning stages of the hybrid series.