TMC13 Deposition Rate Controller for Thin Film Applications May 3, 2012

The feature-rich touch-screen interface can be easily
customised to suit a particular operator preference and
can be operated in both automatic and manual modes, providing a direct display and control of film thickness, deposition rate and frequency value for up to 6 independent deposition sources.

The device also includes shutter relays for each channel, two analogue inputs for connection of pressure gauges, and two re-transmission analogue outputs, as well as an extensive, fully editable materials library.

Where control features are not required, the quartz balance can be interfaced directly with a PC via the compact single channel TM13 interface which provides a highly stable and repeatable frequency to rate/thickness conversion for all industry standard 6MHz quartz crystals.

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