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Product details

TMC13 Deposition Rate Controller for Thin Film Applications May 3, 2012

Company details

Henniker Scientific Ltd.
Unit B3, Trident Business Park
Daten Avenue
Warrington
WA3 6AX
United Kingdom

Tel: +44 (0) 1925 830 771
Fax: +44 (0) 1925 800 035

The TMC13 Deposition Rate Controller from Henniker Scientific is a versatile, multi-channel device designed for reliable control of film thickness and rate in thin film deposition processes.

The feature-rich touch-screen interface can be easily
customised to suit a particular operator preference and
can be operated in both automatic and manual modes, providing a direct display and control of film thickness, deposition rate and frequency value for up to 6 independent deposition sources.

The device also includes shutter relays for each channel, two analogue inputs for connection of pressure gauges, and two re-transmission analogue outputs, as well as an extensive, fully editable materials library.

Where control features are not required, the quartz balance can be interfaced directly with a PC via the compact single channel TM13 interface which provides a highly stable and repeatable frequency to rate/thickness conversion for all industry standard 6MHz quartz crystals.

 

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