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Product details

STE75 MBE System for III-V, II-VI and III-N compounds growth Dec 3, 2013

Company details

SemiTEq JSC
Engels avenue, 27, bld. 5, lit.A
Saint-Petersburg
194156
Russian Federation

Tel: +2 812 633 05 96

New compact MBE System for III-V, II-VI and III-N compounds growth

Key advantages:
• simple integration to the UHV cluster tool
• all necessary instruments for in-situ monitoring of growth parametersare included in basic Syatem
configuration
• high wafer heating and cooling rates due to features of growth manipulator heating stage, low
temperature difference between control thermo couple and real surface temperature
• compact “footprint”
• extremely low LN2 consumption (less than 10-15 l/h!)
• effective technological support during installation including basic process transfer
• simple System operation and regular technical maintenance

 

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