This site uses cookies. By continuing to use this site you agree to our use of cookies. To find out more, see our Privacy and Cookies policy.
Skip to the content

IOP A community website from IOP Publishing

Product details

STE EB71 Automated station for E-Beam evaporation Dec 3, 2013

Company details

Engels avenue, 27, bld. 5, lit.A
Russian Federation

Tel: +2 812 633 05 96

The system design enables to integrate it into multipurpose UHV cluster process line. Maximum quantity of wafers: 3х3” or 6х2”.

Main advantages:
• process chamber made of stainless steel with ConFlat sealing, integrated wall water cooling and dry pumping
system based on powerful ion pump 500 l/sec
• water-cooled screen for evaporated materials utilization
• system design was well proved in a semiconductor devices production of microwave electronics
• thickness uniformity less than ±2% on the substrate holder diameter up to 180 mm with a specially developed «mask» technology
• ability to optimize material consumption by changing substrate-evaporator distance, in particular, the consumption
of gold is 3-4 g/μm with rate 5 Å/sec and working distance 250 mm


More products from this company