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Product details

High dynamical positioning system for semiconductor industry Dec 13, 2013

Company details

Piezosystem Jena GmbH
Stockholmer Str. 12

Tel: +49 3641-66880
Fax: +49 3641-668866

Precise movement in nanometer range with TRITOR 320 CAP

The 3-axes positioning element TRITOR 320 CAP offered by piezosystem jena, is an actuator for high accuracy positioning. This element was developed with use of FEM-technology with the goal of accuracy positioning and outstanding dynamics of large loads. The performance of the TRITOR 320 can be attributed to its construction with flexure hinges. Through the use of capacitive sensors the TRITOR 320 CAP achieves excellent precision. Especially in applications of the semiconductor industry, surface analysis, mask inspection, the TRITOR CAP 320 is an excelent product.

•precise and high dynamical movement
•load up to 200N
•1 nm resolution in closed-loop
•motion up to 320 µm
•possibility of adjustment for vacuum and low temperature application
•aperture 150 x 150mm on request.


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