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Park Systems Introduces Automatic Defect Review for Semiconductor Wafers Apr 3, 2014

Company details

Park Systems
KANC 4F, Iui-Dong 906-10
Suwon
Korea
Korea, Republic of

Tel: +82-31-546-6800
Fax: +82-31-546-6805

An Astounding 1,000% Throughput Increase

Santa Clara, CA April 01, 2014 - Park Systems, a leading manufacturer of atomic force microscopy (AFM) products, proudly introduces the Automatic Defect Review (ADR)AFM for 300mm bare wafers, a fully automated AFM solution that improves throughput of AFM defect review by up to 1,000%. The 300mm bare wafer ADR AFM is a new process for identifying defects designed specifically for the semiconductor market without the need of reference markers.

 

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