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Small Size and High Resolution for 10-6 hPa Feb 13, 2015

Miniature Stage only 24 mm wide with a Resolution of 0.5 nm Physik Instrumente (PI) has now introduced vacuum-compatible versions of the LPS-24 series.

Under vacuum conditions down to 10-6 hPa, the miniature stages of only 24 mm in width achieve a sub-nanometer resolution over a travel range of 15 mm.

Thus, they fulfil important requirements for the positioning of optical and mechanical components or for the adjustment and manipulation of samples in vacuum with a confined space.

The position is measured with an integrated linear encoder that has a resolution of 150 nm or 20 nm. PI's own linear encoder PIOne even achieves a resolution of 0.5 mm and a minimum step size of 1 nm.

A version of LPS-24 for ultra-high vacuum up to 10-9 hPa is available. It allows the smallest incremental motions of 40 nm.