This site uses cookies. By continuing to use this site you agree to our use of cookies. To find out more, see our Privacy and Cookies policy.
Skip to the content

IOP A community website from IOP Publishing

Product details

Park Systems Joins Forces with imec Mar 2, 2015

to Develop Advancements in Nanoscale AFM Metrology Solutions for Semiconductor Manufacturing

Park Systems, world-leader in Atomic Force Microscopes (AFM) announced today they have signed a Joint Development Project (JDP) with nanoelectronics research center imec, to develop in-line AFM metrology solutions of future technology nodes including but not limited to surface roughness, thickness, critical dimension (CD), and sidewall roughness. The JDP will develop new protocol designed to increase production yield and device performance for the semiconductor industry. Park Systems has officially joined imec's Industrial Affiliation Program (IIAP) and become a new member of IIAP at a signing ceremony in Seoul Korea on Feb 3, 2015.


More products from this company