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Park Systems Joins Forces with imec Mar 2, 2015

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Park Systems
KANC 4F, Iui-Dong 906-10
Suwon
Korea
Korea, Republic of

Tel: +82-31-546-6800
Fax: +82-31-546-6805

to Develop Advancements in Nanoscale AFM Metrology Solutions for Semiconductor Manufacturing

Park Systems, world-leader in Atomic Force Microscopes (AFM) announced today they have signed a Joint Development Project (JDP) with nanoelectronics research center imec, to develop in-line AFM metrology solutions of future technology nodes including but not limited to surface roughness, thickness, critical dimension (CD), and sidewall roughness. The JDP will develop new protocol designed to increase production yield and device performance for the semiconductor industry. Park Systems has officially joined imec's Industrial Affiliation Program (IIAP) and become a new member of IIAP at a signing ceremony in Seoul Korea on Feb 3, 2015.

 

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