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Product details

ESPion Langmuir probe for plasma process characterisation Apr 14, 2016

Company details

Hiden Analytical Limited
420 Europa Boulevard
Warrington
Cheshire
WA5 7UN
United Kingdom

Tel: +44 (0)1925 445225
Fax: +44 (0)1925 416518

The Hiden ESPion Langmuir-style electrostatic plasma probes, now for operation in both RF and DC plasma, automatically report the critical characteristics of electron density...

... and energy distribution, electron temperature, ion density, plasma potential and floating potential, providing the rapid accurate feedback essential for plasma-based process analysis and control.

 

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