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New NX20 300mm, the only AFM capable of scanning the entire 300mm wafer sample Aug 4, 2016

Company details

Park Systems
KANC 4F, Iui-Dong 906-10
Suwon
Korea
Korea, Republic of

Tel: +82-31-546-6800
Fax: +82-31-546-6805

Park Systems Introduces the Only AFM Capable of 300mm Wafer Scans for Defect Review and Failure Analysis in Semiconductor Manufacturing and Research

Park Systems, world leading manufacturer of Atomic Force Microscope today announced NX20 300mm, the only AFM on the market capable of scanning the entire sample area of 300mm wafers using a 300mm vacuum chuck while keeping the system noise level below 0.5angstrom (Å) RMS. Park NX20 300mm enables AFM inspection and scans over the entire sample area of 300mm wafers by using a full 300mm x 300mm motorized XY stage so the system can access any location on a 300mm wafer.

 

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